| Customization: | Available |
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| After-sales Service: | Online Technical Support |
| Warranty: | 1 Year |
| Shipping Cost: | Contact the supplier about freight and estimated delivery time. |
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Main machine | ||||||||
Model | KM-X5000series | |||||||
Measurement principle | Telecentric optical imaging | |||||||
Spectral confocal | ||||||||
Probe contact | ||||||||
Camera | High-precision camera | Wide-FOV camera | ||||||
Pixel | 25million | |||||||
Spectrum | Mono | Color,Mono | ||||||
Single FOV/mm | 6x6 | 25x25 | ||||||
Stitched FOV/mm | 306x206 | 325x225 | ||||||
Single FOV measurement accuracy/μm | ≤±0.7 | ≤±2 | ||||||
Stitched measurement accuracy/μm | Single-axis stitching≤1.8+L/50 | |||||||
Two-axis stitching≤2.8+L/50 | ||||||||
L represents the measurement length, with units in mm | ||||||||
Feature scanning range/mm | 220x170 | |||||||
Lighting | White coaxial light | |||||||
Four-zone adjustable four-color ring light | ||||||||
Four-zone adjustable four-color slit light | ||||||||
Four-color bottom parallel light | ||||||||
Each zone can be independently controlled for opening and closing | ||||||||
Colors and intensity can be adjusted | ||||||||
The ring light source supports automatic safety rebound | ||||||||
Supports automated lighting | ||||||||
Supports light source expansion | ||||||||
Focus Z-axis | Auto focus, manual focus | |||||||
XY stage movable range/mm | 300x200 | |||||||
XY stage scanning interval/μm | 1-500μm | |||||||
XY stage driving method | Linear motor | |||||||
Laser lens | ||||||||
Model | KM-LN001 | KM-LN002 | KM-LN003 | KM-LN004 | KM-LN005 | KM-LN006 | ||
Measurement range/μm | ±50 | ±200 | ±600 | ±1300 | ±2000 | ±5000 | ||
Film thickness resolution/μm | 5 | 20 | 60 | 130 | 200 | 500 | ||
Maximum measurable feature angle/° | ±46.5 | ±43 | ±32 | ±31 | ±21 | ±13 | ||
Function | Supports software-controlled switching | |||||||
Supports automatic safety rebound | ||||||||
*Each KM-X5000 series model can be optionally equipped with two types | ||||||||










